3-D SRIM Simulation of Focused Ion Beam Sputtering with an Application-Oriented Incident Beam Model
出版年份 2019 全文链接
标题
3-D SRIM Simulation of Focused Ion Beam Sputtering with an Application-Oriented Incident Beam Model
作者
关键词
-
出版物
Applied Sciences-Basel
Volume 9, Issue 23, Pages 5133
出版商
MDPI AG
发表日期
2019-11-27
DOI
10.3390/app9235133
参考文献
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