标题
Development of micro-hotplate and its reliability for gas sensing applications
作者
关键词
-
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 124, Issue 11, Pages -
出版商
Springer Nature
发表日期
2018-10-30
DOI
10.1007/s00339-018-2210-4
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Design, simulation and fabrication of LTCC-based microhotplate for gas sensor applications
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- Low-cost surface micromachined microhotplates for chemiresistive gas sensors
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- Development of a Reliable Micro-Hotplate With Low Power Consumption
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- Temperature, humidity and gas sensors integrated on plastic foil for low power applications
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- Tungsten-Based SOI Microhotplates for Smart Gas Sensors
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