Surface engineering of Pt thin films by low energy heavy ion irradiation

标题
Surface engineering of Pt thin films by low energy heavy ion irradiation
作者
关键词
Rutherford backscattering spectrometry (RBS), Argon plasma, Micro-architecture, Ion–surface interaction, Surface roughness, SRIM-TRIM calculations
出版物
APPLIED SURFACE SCIENCE
Volume 540, Issue -, Pages 148338
出版商
Elsevier BV
发表日期
2020-11-04
DOI
10.1016/j.apsusc.2020.148338

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