ALD/MLD of novel layer-engineered Zn-based inorganic–organic hybrid thin films using heterobifunctional 4-aminophenol as an organic precursor
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Title
ALD/MLD of novel layer-engineered Zn-based inorganic–organic hybrid thin films using heterobifunctional 4-aminophenol as an organic precursor
Authors
Keywords
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Journal
DALTON TRANSACTIONS
Volume 42, Issue 11, Pages 3869
Publisher
Royal Society of Chemistry (RSC)
Online
2012-12-22
DOI
10.1039/c2dt32630b
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