Atomic layer deposition: state-of-the-art and research/industrial perspectives
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Title
Atomic layer deposition: state-of-the-art and research/industrial perspectives
Authors
Keywords
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Journal
CORROSION REVIEWS
Volume 29, Issue 5-6, Pages -
Publisher
Walter de Gruyter GmbH
Online
2011-10-13
DOI
10.1515/corrrev.2011.010
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