The influence of substrate on the adhesion behaviors of atomic layer deposited aluminum oxide films

Published 2010 View Full Article

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Title
The influence of substrate on the adhesion behaviors of atomic layer deposited aluminum oxide films
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue 8-9, Pages 2846-2851
Publisher
Elsevier BV
Online
2010-10-31
DOI
10.1016/j.surfcoat.2010.10.052

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