Atomic layer deposition: state-of-the-art and research/industrial perspectives

Low-temperature atomic layer deposition of Al2O3 thin coatings for corrosion protection of steel: Surface and electrochemical analysis

(2011) Belén Díaz et al.   CORROSION SCIENCE

Corrosion protection of AISI 316 stainless steel by ALD alumina/titania nanometric coatings

(2011) E. Marin et al.   Journal of Coatings Technology and Research

Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection

(2011) S. E. Potts et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Development and industrial scale-up of ZrO2 coatings and hybrid organic–inorganic coatings used as pre-treatments before painting aluminium alloys

(2011) F. Andreatta et al.   PROGRESS IN ORGANIC COATINGS

Utilisation of continuous atomic layer deposition process for barrier enhancement of extrusion-coated paper

(2011) Kimmo Lahtinen et al.   SURFACE & COATINGS TECHNOLOGY

Cleavage of the C–O–C bond on size-selected subnanometer cobalt catalysts and on ALD-cobalt coated nanoporous membranes

(2010) Weiling Deng et al.   APPLIED CATALYSIS A-GENERAL

Highly dispersed Pt nanoparticle catalyst prepared by atomic layer deposition

(2010) Jianhua Li et al.   APPLIED CATALYSIS B-ENVIRONMENTAL

Theoretical Simulation of Surface Evolution Using the Random Deposition and Surface Relaxation for Metal Oxide Film in Atomic Layer Deposition

(2010) Ji-Hoon Ahn et al.   JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY

Improved performance of dye-sensitized solar cells with TiO2/alumina core–shell formation using atomic layer deposition

(2010) V. Ganapathy et al.   JOURNAL OF POWER SOURCES

Encapsulation of organic solar cells with ultrathin barrier layers deposited by ozone-based atomic layer deposition

(2010) Smita Sarkar et al.   ORGANIC ELECTRONICS

Encapsulation of Cu(InGa)Se2 solar cell with Al2O3 thin-film moisture barrier grown by atomic layer deposition

(2010) P.F. Carcia et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Improvement of wear and cavitation–erosion by ALD-deposited LiAlxOy films on an Mg–10Li–0.5Zn alloy

(2010) P.C. Wang et al.   SURFACE & COATINGS TECHNOLOGY

The influence of substrate on the adhesion behaviors of atomic layer deposited aluminum oxide films

(2010) J.N. Ding et al.   SURFACE & COATINGS TECHNOLOGY

A study of atomic layer deposited LiAlxOy films on Mg–Li alloys

(2010) P.C. Wang et al.   THIN SOLID FILMS

Low-loss optical waveguides for the near ultra-violet and visible spectral regions with Al2O3 thin films from atomic layer deposition

(2010) Mustafa M. Aslan et al.   THIN SOLID FILMS

Atomic layer deposition on polymer based flexible packaging materials: Growth characteristics and diffusion barrier properties

(2010) Tommi O. Kääriäinen et al.   THIN SOLID FILMS

Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

(2009) Chang-Soo Lee et al.   APPLIED CATALYSIS B-ENVIRONMENTAL

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Influence of annealing duration on optical property and surface morphology of ZnO thin film grown by atomic layer deposition

(2009) C.R. Kim et al.   CURRENT APPLIED PHYSICS

Chemical and electrochemical characterization of hybrid PVD+ALD hard coatings on tool steel

(2009) E. Marin et al.   ELECTROCHEMISTRY COMMUNICATIONS

Electrochemical atomic layer deposition of copper nanofilms on ruthenium

(2009) Daniel K. Gebregziabiher et al.   JOURNAL OF CRYSTAL GROWTH

In situspectroscopic ellipsometry as a versatile tool for studying atomic layer deposition

(2009) E Langereis et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Atomic layer deposition of tantalum oxide thin films for their use as diffusion barriers in microelectronic devices

(2009) A. Lintanf-Salaün et al.   MICROELECTRONIC ENGINEERING

TEM characterization of ALD layers in deep trenches using a dedicated FIB lamellae preparation method

(2009) J. Gluch et al.   THIN SOLID FILMS

Low temperature atomic layer deposition of titania thin films

(2009) G. Triani et al.   THIN SOLID FILMS

Effect of atomic layer deposited ultra thin HfO2 and Al2O3 interfacial layers on the performance of dye sensitized solar cells

(2009) Mariyappan Shanmugam et al.   THIN SOLID FILMS

Atomic layer deposited aluminum oxide barrier coatings for packaging materials

(2009) Terhi Hirvikorpi et al.   THIN SOLID FILMS

Surface modification of thermoplastics by atomic layer deposition of Al2O3 and TiO2 thin films

(2008) Marianna Kemell et al.   EUROPEAN POLYMER JOURNAL

Barrier properties of polymer/alumina nanocomposite membranes fabricated by atomic layer deposition

(2008) Xinhua Liang et al.   JOURNAL OF MEMBRANE SCIENCE

Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma

(2008) Qi Xie et al.   MICROELECTRONIC ENGINEERING

Atomic layer deposition of titanium nitride from TDMAT precursor

(2008) J. Musschoot et al.   MICROELECTRONIC ENGINEERING

Atomic layer deposition of LSM cathodes for solid oxide fuel cells

(2008) Timothy P. Holme et al.   SOLID STATE IONICS

Improvement in corrosion resistance of CrN coated stainless steel by conformal TiO2 deposition

(2007) C.X. Shan et al.   SURFACE & COATINGS TECHNOLOGY

Corrosion resistance of TiO2 films grown on stainless steel by atomic layer deposition

(2007) C.X. Shan et al.   SURFACE & COATINGS TECHNOLOGY