Atomic layer deposition of titanium nitride from TDMAT precursor

Title
Atomic layer deposition of titanium nitride from TDMAT precursor
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 1, Pages 72-77
Publisher
Elsevier BV
Online
2008-10-03
DOI
10.1016/j.mee.2008.09.036

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