The future of focused electron beam-induced processing

The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition

(2014) Robert Winkler et al.   ACS Applied Materials & Interfaces

Size and shape control of sub-20 nm patterns fabricated using focused electron beam-induced processing

(2014) Sangeetha Hari et al.   Journal of Micro-Nanolithography MEMS and MOEMS

Electron-Beam-Assisted Oxygen Purification at Low Temperatures for Electron-Beam-Induced Pt Deposits: Towards Pure and High-Fidelity Nanostructures

(2013) Harald Plank et al.   ACS Applied Materials & Interfaces

Fabrication and electrical transport properties of binary Co-Si nanostructures prepared by focused electron beam-induced deposition

(2013) F. Porrati et al.   JOURNAL OF APPLIED PHYSICS

A new sequential EBID process for the creation of pure Pt structures from MeCpPtMe3

(2013) S Mehendale et al.   NANOTECHNOLOGY

Electron induced reactions of surface adsorbed tungsten hexacarbonyl (W(CO)6)

(2013) Samantha G. Rosenberg et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Molecule-by-Molecule Writing Using a Focused Electron Beam

(2012) Willem F. van Dorp et al.   ACS Nano

Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum

(2012) Nicholas A. Roberts et al.   Nanoscale

Room temperature L10phase transformation in binary CoPt nanostructures prepared by focused-electron-beam-induced deposition

(2012) F Porrati et al.   NANOTECHNOLOGY

Binary Pt–Si Nanostructures Prepared by Focused Electron-Beam-Induced Deposition

(2011) Marcel Winhold et al.   ACS Nano

Fundamental Proximity Effects in Focused Electron Beam Induced Deposition

(2011) Harald Plank et al.   ACS Nano

Tuning the electrical conductivity of Pt-containing granular metals by postgrowth electron irradiation

(2011) F. Porrati et al.   JOURNAL OF APPLIED PHYSICS

Fundamental Electron-Precursor-Solid Interactions Derived from Time-Dependent Electron-Beam-Induced Deposition Simulations and Experiments

(2010) Jason D. Fowlkes et al.   ACS Nano

Electron optics of multi-beam scanning electron microscope

(2010) A. Mohammadi-Gheidari et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Electron beam deposition for nanofabrication: Insights from surface science

(2010) J.D. Wnuk et al.   SURFACE SCIENCE

Electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV): Total cross section as a function of incident electron energy

(2009) W. F. van Dorp et al.   JOURNAL OF APPLIED PHYSICS

Resists for sub-20-nm electron beam lithography with a focus on HSQ: state of the art

(2009) A E Grigorescu et al.   NANOTECHNOLOGY

Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective

(2009) A Botman et al.   NANOTECHNOLOGY

A critical literature review of focused electron beam induced deposition

(2008) W. F. van Dorp et al.   JOURNAL OF APPLIED PHYSICS

Proximity effects in nanoscale patterning with high resolution electron beam induced deposition

(2008) Peter A. Crozier   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Gas-assisted focused electron beam and ion beam processing and fabrication

(2008) Ivo Utke et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

The influence of beam defocus on volume growth rates for electron beam induced platinum deposition

(2008) H Plank et al.   NANOTECHNOLOGY

Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition

(2008) W F van Dorp et al.   NANOTECHNOLOGY