The influence of beam defocus on volume growth rates for electron beam induced platinum deposition

Published 2008 View Full Article

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Title
The influence of beam defocus on volume growth rates for electron beam induced platinum deposition
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 48, Pages 485302
Publisher
IOP Publishing
Online
2008-11-12
DOI
10.1088/0957-4484/19/48/485302

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