Electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV): Total cross section as a function of incident electron energy

Electron Induced Surface Reactions of the Organometallic Precursor Trimethyl(methylcyclopentadienyl)platinum(IV)

(2009) Joshua D. Wnuk et al.   Journal of Physical Chemistry C

Focused Electron-Beam-Induced Deposition of 3 nm Dots in a Scanning Electron Microscope

(2009) Leon van Kouwen et al.   NANO LETTERS

A critical literature review of focused electron beam induced deposition

(2008) W. F. van Dorp et al.   JOURNAL OF APPLIED PHYSICS

Chemical Synthesis Induced by Dissociative Electron Attachment

(2008) Mahesh Rajappan et al.   Journal of Physical Chemistry C

Electron-beam-induced deposition of platinum at low landing energies

(2008) A. Botman et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Gas-assisted focused electron beam and ion beam processing and fabrication

(2008) Ivo Utke et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Inhibiting spontaneous etching of nanoscale electron beam induced etching features: Solutions for nanoscale repair of extreme ultraviolet lithography masks

(2008) Matthew G. Lassiter et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition

(2008) W F van Dorp et al.   NANOTECHNOLOGY