Electron optics of multi-beam scanning electron microscope

Published 2010 View Full Article

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Title
Electron optics of multi-beam scanning electron microscope
Authors
Keywords
-
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
Volume 645, Issue 1, Pages 60-67
Publisher
Elsevier BV
Online
2010-12-22
DOI
10.1016/j.nima.2010.12.090

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