Microstructure and tribological behavior of TiAlSiN coatings deposited by deep oscillation magnetron sputtering
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Title
Microstructure and tribological behavior of TiAlSiN coatings deposited by deep oscillation magnetron sputtering
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Keywords
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Journal
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
Volume -, Issue -, Pages -
Publisher
Wiley
Online
2018-05-17
DOI
10.1111/jace.15769
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Note: Only part of the references are listed.- Structure, adhesion and corrosion behavior of CrN/TiN superlattice coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering
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- Tailoring the nanostructure of Ti–Si–N thin films by HiPIMS in deep oscillation magnetron sputtering (DOMS) mode
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- Tribological properties of CrSiN-coated 301 stainless steel under wet and dry conditions
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