Deposition and characterization of TiAlSiN nanocomposite coatings prepared by reactive pulsed direct current unbalanced magnetron sputtering

Published 2010 View Full Article

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Title
Deposition and characterization of TiAlSiN nanocomposite coatings prepared by reactive pulsed direct current unbalanced magnetron sputtering
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 21, Pages 6420-6426
Publisher
Elsevier BV
Online
2010-04-19
DOI
10.1016/j.apsusc.2010.04.028

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