Microstructure and tribological behavior of TiAlSiN coatings deposited by deep oscillation magnetron sputtering
出版年份 2018 全文链接
标题
Microstructure and tribological behavior of TiAlSiN coatings deposited by deep oscillation magnetron sputtering
作者
关键词
-
出版物
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
Volume -, Issue -, Pages -
出版商
Wiley
发表日期
2018-05-17
DOI
10.1111/jace.15769
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Structure, adhesion and corrosion behavior of CrN/TiN superlattice coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering
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