Effect of microstructure on mechanical and tribological properties of TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering

Published 2015 View Full Article

Authors

Keywords

Modulated pulsed power magnetron sputtering, Titanium aluminum silicon nitride, Nanocomposite, Hardness, Wear

Journal

THIN SOLID FILMS

Volume 597, Issue -, Pages 197-205

Publisher

Elsevier BV

Online

2015-12-01

DOI

10.1016/j.tsf.2015.11.047

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