Mechanical and tribological properties of CrN/TiN superlattice coatings deposited by a combination of arc-free deep oscillation magnetron sputtering with pulsed dc magnetron sputtering

Published 2015 View Full Article

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Title
Mechanical and tribological properties of CrN/TiN superlattice coatings deposited by a combination of arc-free deep oscillation magnetron sputtering with pulsed dc magnetron sputtering
Authors
Keywords
CrN/TiN superlattice coatings, Deep oscillation magnetron sputtering, Pulsed direct-current magnetron sputtering, Mechanical properties, Tribological properties
Journal
THIN SOLID FILMS
Volume 594, Issue -, Pages 147-155
Publisher
Elsevier BV
Online
2015-10-10
DOI
10.1016/j.tsf.2015.09.067

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