Enhanced piezoelectricity of thin film hafnia-zirconia (HZO) by inorganic flexible substrates

Title
Enhanced piezoelectricity of thin film hafnia-zirconia (HZO) by inorganic flexible substrates
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 113, Issue 2, Pages 022905
Publisher
AIP Publishing
Online
2018-07-13
DOI
10.1063/1.5031134

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