Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

(2017) Oili M. E. Ylivaara et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Design and Analysis of Nano-Structured Gratings for Conversion Efficiency Improvement in GaAs Solar Cells

(2016) Narottam Das et al.   Energies

Antireflective Coatings for Glass and Transparent Polymers

(2016) Pascal Buskens et al.   LANGMUIR

Nanostructured Stealth Surfaces for Visible and Near-Infrared Light

(2016) Z. Diao et al.   NANO LETTERS

Nanoporous SiO2thin films made by atomic layer deposition and atomic etching

(2016) Lilit Ghazaryan et al.   NANOTECHNOLOGY

Antireflective Coatings: Conventional Stacking Layers and Ultrathin Plasmonic Metasurfaces, A Mini-Review

(2016) Mehdi Keshavarz Hedayati et al.   Materials

Comparative study of ALD SiO_2 thin films for optical applications

(2016) Kristin Pfeiffer et al.   Optical Materials Express

Angled physical vapor deposition techniques for non-conformal thin films and three-dimensional structures

(2016) Zhuoxian Wang et al.   MRS Communications

Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

(2016) Thomas Siefke et al.   Advanced Optical Materials

Rugate notch filter fabricated by atomic layer deposition

(2014) Yanghui Li et al.   APPLIED OPTICS

Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide

(2014) Stephan Ratzsch et al.   NANOTECHNOLOGY

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

(2014) Matti Putkonen et al.   THIN SOLID FILMS

Energy-enhanced atomic layer deposition for more process and precursor versatility

(2013) S.E. Potts et al.   COORDINATION CHEMISTRY REVIEWS

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics

(2013) Lichao Zhang et al.   TheScientificWorldJOURNAL

Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition

(2013) Chao Zhao et al.   THIN SOLID FILMS

Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

(2013) Oili M.E. Ylivaara et al.   THIN SOLID FILMS

Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties

(2012) G. Dingemans et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Precise broad-band anti-refection coating fabricated by atomic layer deposition

(2012) Yanghui Li et al.   OPTICS COMMUNICATIONS

Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems

(2012) Cunding Liu et al.   OPTICS EXPRESS

High-performance imido–amido precursor for the atomic layer deposition of Ta2O5

(2012) Timothee Blanquart et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Anti-reflective coatings: A critical, in-depth review

(2011) Hemant Kumar Raut et al.   Energy & Environmental Science

Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study

(2011) Maarit Kariniemi et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition

(2011) Paul Poodt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Transmission enhanced optical lenses with self-organized antireflective subwavelength structures for the UV range

(2011) M. Schulze et al.   OPTICS LETTERS

Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39nm structures

(2011) M. Mayer et al.   ULTRAMICROSCOPY

Atomic layer deposition for industrial optical coatings

(2010) Jarmo Maula Jarmo Maula   Chinese Optics Letters

All dielectric hard x-ray mirror by atomic layer deposition

(2009) Adriana Szeghalmi et al.   APPLIED PHYSICS LETTERS

Growth Kinetics and Crystallization Behavior of TiO[sub 2] Films Prepared by Plasma Enhanced Atomic Layer Deposition

(2008) Qi Xie et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY