Angled physical vapor deposition techniques for non-conformal thin films and three-dimensional structures

Title
Angled physical vapor deposition techniques for non-conformal thin films and three-dimensional structures
Authors
Keywords
-
Journal
MRS Communications
Volume 6, Issue 01, Pages 17-22
Publisher
Cambridge University Press (CUP)
Online
2016-02-16
DOI
10.1557/mrc.2016.3

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