Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition

Title
Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 542, Issue -, Pages 38-44
Publisher
Elsevier BV
Online
2013-06-14
DOI
10.1016/j.tsf.2013.06.010

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