Tip-Based Nanofabrication for Scalable Manufacturing

Hard Transparent Arrays for Polymer Pen Lithography

(2016) James L. Hedrick et al.   ACS Nano

Rapid Focused Ion Beam Milling Based Fabrication of Plasmonic Nanoparticles and Assemblies via “Sketch and Peel” Strategy

(2016) Yiqin Chen et al.   ACS Nano

Nanoscale Materials Patterning by Local Electrochemical Lithography 

(2016) He Liu et al.   ADVANCED ENGINEERING MATERIALS

Machining Complex Three-Dimensional Nanostructures With an Atomic Force Microscope Through the Frequency Control of the Tip Reciprocating Motions

(2016) Yanquan Geng et al.   JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME

“Sketch and Peel” Lithography for High-Resolution Multiscale Patterning

(2016) Yiqin Chen et al.   NANO LETTERS

Liquid-Phase Beam Pen Lithography

(2016) Shu He et al.   Small

Production of Centimeter-Scale Gradient Patterns by Graded Elastomeric Tip Array

(2015) Jin Wu et al.   ACS Applied Materials & Interfaces

Direct fabrication of thin layer MoS2 field-effect nanoscale transistors by oxidation scanning probe lithography

(2015) Francisco M. Espinosa et al.   APPLIED PHYSICS LETTERS

Recent advances in AFM tip-based nanomechanical machining

(2015) Yongda Yan et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

(2015) Marcus Kaestner et al.   Journal of Micro-Nanolithography MEMS and MOEMS

A study of long term operation and reliability of heated atomic force microscope cantilevers

(2015) Hoe Joon Kim et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Centimeter-Scale Subwavelength Photolithography Using Metal-Coated Elastomeric Photomasks with Modulated Light Intensity at the Oblique Sidewalls

(2015) Jin Wu et al.   LANGMUIR

Resistless nanofabrication by stencil lithography: A review

(2015) O. Vazquez-Mena et al.   MICROELECTRONIC ENGINEERING

Production of centimeter-scale sub-wavelength nanopatterns by controlling the light path of adhesive photomasks

(2015) Jin Wu et al.   Journal of Materials Chemistry C

Nanocarbon-Scanning Probe Microscopy Synergy: Fundamental Aspects to Nanoscale Devices

(2014) Narendra Kurra et al.   ACS Applied Materials & Interfaces

Single nanoparticle detection using photonic crystal enhanced microscopy

(2014) Yue Zhuo et al.   ANALYST

Hierarchically structured re-entrant microstructures for superhydrophobic surfaces with extremely low hysteresis

(2014) Huan Hu et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Parallel multi-step nanolithography by nanoscale Cu-covered h-PDMS tip array

(2014) Yuan-Jen Chang et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Beam pen lithography based on arrayed polydimethylsiloxane (PDMS) micro-pyramids spin-coated with carbon black photo-resist

(2014) Yu-Zen Chen et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Silicon nano-mechanical resonators fabricated by using tip-based nanofabrication

(2014) Huan Hu et al.   NANOTECHNOLOGY

Fabrication of polymer nanowires via maskless O2plasma etching

(2014) Ke Du et al.   NANOTECHNOLOGY

Nanofluidic channels of arbitrary shapes fabricated by tip-based nanofabrication

(2014) Huan Hu et al.   NANOTECHNOLOGY

Advanced scanning probe lithography

(2014) Ricardo Garcia et al.   Nature Nanotechnology

Apertureless beam pen lithography based on fully metal-coated polyurethane-acrylate (PUA) pyramidal microstructure array

(2014) Chun-Ying Wu et al.   OPTICS EXPRESS

Apertureless Cantilever-Free Pen Arrays for Scanning Photochemical Printing

(2014) Yu Zhou et al.   Small

Parallel nanoimaging using an array of 30 heated microcantilevers

(2014) Myunghoon Seong et al.   RSC Advances

Controlled nanodot fabrication by rippling polycarbonate surface using an AFM diamond tip

(2014) Yongda Yan et al.   Nanoscale Research Letters

Nanofabrication on monocrystalline silicon through friction-induced selective etching of Si3N4 mask

(2014) Jian Guo et al.   Nanoscale Research Letters

Transport spectroscopy of a graphene quantum dot fabricated by atomic force microscope nanolithography

(2013) R. K. Puddy et al.   APPLIED PHYSICS LETTERS

Scanning Probe Lithography with Negative and Positive Electron Beam Resists

(2013) Lydia Anggraini et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Thermal Probe Maskless Lithography for 27.5 nm Half-Pitch Si Technology

(2013) Lin Lee Cheong et al.   NANO LETTERS

Parallelization of thermochemical nanolithography

(2013) Keith M. Carroll et al.   Nanoscale

Parallel nanoimaging and nanolithography using a heated microcantilever array

(2013) Suhas Somnath et al.   NANOTECHNOLOGY

Large-area molecular patterning with polymer pen lithography

(2013) Daniel J Eichelsdoerfer et al.   Nature Protocols

Spin-dependent shot noise enhancement in a quantum dot

(2013) Niels Ubbelohde et al.   PHYSICAL REVIEW B

Origins of conductance anomalies in ap-type GaAs quantum point contact

(2013) Y. Komijani et al.   PHYSICAL REVIEW B

Desktop nanofabrication with massively multiplexed beam pen lithography

(2013) Xing Liao et al.   Nature Communications

Nanometer-Scale Infrared Spectroscopy of Heterogeneous Polymer Nanostructures Fabricated by Tip-Based Nanofabrication

(2012) Jonathan R. Felts et al.   ACS Nano

Thermal crosstalk in heated microcantilever arrays

(2012) Hoe Joon Kim et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Quantum and Thermal Phase Slips in Superconducting Niobium Nitride (NbN) Ultrathin Crystalline Nanowire: Application to Single Photon Detection

(2012) Cécile Delacour et al.   NANO LETTERS

Nano-fabrication with a flexible array of nano-apertures

(2012) Huan Hu et al.   NANOTECHNOLOGY

Patterning of sub-1 nm dangling-bond lines with atomic precision alignment on H:Si(100) surface at room temperature

(2012) S Chen et al.   NANOTECHNOLOGY

Ultrananocrystalline diamond tip integrated onto a heated atomic force microscope cantilever

(2012) Hoe Joon Kim et al.   NANOTECHNOLOGY

Atomic force microscopy based manipulation of graphene using dynamic plowing lithography

(2012) Borislav Vasić et al.   NANOTECHNOLOGY

Nanometer-scale flow of molten polyethylene from a heated atomic force microscope tip

(2012) Jonathan R Felts et al.   NANOTECHNOLOGY

Heated atomic force cantilever closed loop temperature control and application to high speed nanotopography imaging

(2012) Suhas Somnath et al.   SENSORS AND ACTUATORS A-PHYSICAL

Fabrication mechanism of friction-induced selective etching on Si(100) surface

(2012) Jian Guo et al.   Nanoscale Research Letters

Ultrahigh Throughput Silicon Nanomanufacturing by Simultaneous Reactive Ion Synthesis and Etching

(2011) Yi Chen et al.   ACS Nano

Nanoscale Lithography on Monolayer Graphene Using Hydrogenation and Oxidation

(2011) Ik-Su Byun et al.   ACS Nano

Using patterned H-resist for controlled three-dimensional growth of nanostructures

(2011) K. E. J. Goh et al.   APPLIED PHYSICS LETTERS

Parallel AFM imaging and force spectroscopy using two-dimensional probe arrays for applications in cell biology

(2011) Mélanie Favre et al.   JOURNAL OF MOLECULAR RECOGNITION

Ultrahigh-QNanocavities Written with a Nanoprobe

(2011) Atsushi Yokoo et al.   NANO LETTERS

Large-area pattern transfer of metallic nanostructures on glass substrates via interference lithography

(2011) Ke Du et al.   NANOTECHNOLOGY

Rapid turnaround scanning probe nanolithography

(2011) Philip C Paul et al.   NANOTECHNOLOGY

Hard-tip, soft-spring lithography

(2011) Wooyoung Shim et al.   NATURE

Wear-Resistant Diamond Nanoprobe Tips with Integrated Silicon Heater for Tip-Based Nanomanufacturing

(2010) Patrick C. Fletcher et al.   ACS Nano

Arrays of SU-8 microcantilevers with integrated piezoresistive sensors for parallel AFM applications

(2010) Andreas Schneider et al.   MICROELECTRONIC ENGINEERING

Silicon nanowire circuits fabricated by AFM oxidation nanolithography

(2010) Ramses V Martínez et al.   NANOTECHNOLOGY

Ultralow nanoscale wear through atom-by-atom attrition in silicon-containing diamond-like carbon

(2010) Harish Bhaskaran et al.   Nature Nanotechnology

Parallel optical nanolithography using nanoscale bowtie aperture array

(2010) Sreemanth M.V. Uppuluri et al.   OPTICS EXPRESS

Nanoscale Three-Dimensional Patterning of Molecular Resists by Scanning Probes

(2010) D. Pires et al.   SCIENCE

Nanoscale Tunable Reduction of Graphene Oxide for Graphene Electronics

(2010) Z. Wei et al.   SCIENCE

Top-Down Nanomechanical Machining of Three-Dimensional Nanostructures by Atomic Force Microscopy

(2010) Yongda Yan et al.   Small

Direct writing and characterization of poly(p-phenylene vinylene) nanostructures

(2009) Debin Wang et al.   APPLIED PHYSICS LETTERS

Chemical Mechanical Planarization: Slurry Chemistry, Materials, and Mechanisms

(2009) Mahadevaiyer Krishnan et al.   CHEMICAL REVIEWS

Microfabrication of colloidal scanning probes with controllable tip radii of curvature

(2009) Murat Kaya Yapici et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Understanding of hydrogen silsesquioxane electron resist for sub-5-nm-half-pitch lithography

(2009) Joel K. W. Yang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Maskless Nanoscale Writing of Nanoparticle−Polymer Composites and Nanoparticle Assemblies using Thermal Nanoprobes

(2009) Woo Kyung Lee et al.   NANO LETTERS

A 100 nanometer scale resistive heater–thermometer on a silicon cantilever

(2009) Z Dai et al.   NANOTECHNOLOGY

Thermochemical nanopatterning of organic semiconductors

(2009) Oliver Fenwick et al.   Nature Nanotechnology

Silicon microcantilever hotplates with high temperature uniformity

(2009) Natalya L. Privorotskaya et al.   SENSORS AND ACTUATORS A-PHYSICAL

Nanofountain-Probe-Based High-Resolution Patterning and Single-Cell Injection of Functionalized Nanodiamonds

(2009) Owen Loh et al.   Small

Atomic-Scale Templates Patterned by Ultrahigh Vacuum Scanning Tunneling Microscopy on Silicon

(2008) Michael A. Walsh et al.   Annual Review of Physical Chemistry

Liquid Operation of Silicon Microcantilever Heaters

(2008) Jungchul Lee et al.   IEEE SENSORS JOURNAL

A novel micromachining technique for the batch fabrication of scanning probe arrays with precisely defined tip contact areas

(2008) Murat Kaya Yapici et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Scanning proximal probes for parallel imaging and lithography

(2008) K. Ivanova et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Silicon Nanowire Transistors with a Channel Width of 4 nm Fabricated by Atomic Force Microscope Nanolithography

(2008) J. Martinez et al.   NANO LETTERS

Thermo-mechanical probe storage at Mbps single-probe data rates and Tbit in−2densities

(2008) Rachel J Cannara et al.   NANOTECHNOLOGY

Electric field-induced direct delivery of proteins by a nanofountain probe

(2008) O. Y. Loh et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Polymer Pen Lithography

(2008) F. Huo et al.   SCIENCE

The nanopatterning of a stimulus-responsive polymer by thermal dip-pen nanolithography

(2008) Woo-Kyung Lee et al.   Soft Matter

Direct Delivery and Submicrometer Patterning of DNA by a Nanofountain Probe

(2007) K.-H. Kim et al.   ADVANCED MATERIALS

Microcantilever hotplates with temperature-compensated piezoresistive strain sensors

(2007) Fabian Goericke et al.   SENSORS AND ACTUATORS A-PHYSICAL

Fabrication of nanostructures with laser interference lithography

(2006) Q. Xie et al.   JOURNAL OF ALLOYS AND COMPOUNDS