Thermal Probe Maskless Lithography for 27.5 nm Half-Pitch Si Technology

Published 2013 View Full Article

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Title
Thermal Probe Maskless Lithography for 27.5 nm Half-Pitch Si Technology
Authors
Keywords
-
Journal
NANO LETTERS
Volume 13, Issue 9, Pages 4485-4491
Publisher
American Chemical Society (ACS)
Online
2013-08-21
DOI
10.1021/nl4024066

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