Parallel nanoimaging and nanolithography using a heated microcantilever array

Published 2013 View Full Article

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Title
Parallel nanoimaging and nanolithography using a heated microcantilever array
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 25, Issue 1, Pages 014001
Publisher
IOP Publishing
Online
2013-12-12
DOI
10.1088/0957-4484/25/1/014001

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