Silicon nano-mechanical resonators fabricated by using tip-based nanofabrication
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Title
Silicon nano-mechanical resonators fabricated by using tip-based nanofabrication
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 25, Issue 27, Pages 275301
Publisher
IOP Publishing
Online
2014-06-25
DOI
10.1088/0957-4484/25/27/275301
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