Polystyrene core–silica shell composite particles: effect of mesoporous shell structures on oxide CMP and mechanical stability

Fabrication of the novel core-shell MCM-41@mTiO 2 composite microspheres with large specific surface area for enhanced photocatalytic degradation of dinitro butyl phenol (DNBP)

(2016) Xiao-Na Wei et al.   APPLIED SURFACE SCIENCE

Polishing mechanism and surface damage analysis of type IIa single crystal diamond processed by mechanical and chemical polishing methods

(2016) Natsuo Tatsumi et al.   DIAMOND AND RELATED MATERIALS

Silica abrasives containing solid cores and mesoporous shells: Synthesis, characterization and polishing behavior for SiO 2 film

(2016) Ailian Chen et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Monodispersed mesoporous silica (mSiO2) spheres as abrasives for improved chemical mechanical planarization performance

(2016) Yang Chen et al.   JOURNAL OF MATERIALS SCIENCE

Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates

(2016) Hong Lei et al.   MATERIALS CHEMISTRY AND PHYSICS

Preparation of La-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates

(2016) Hong Lei et al.   PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

A material removal model for silicon oxide layers in chemical mechanical planarization considering the promoted chemical reaction by the down pressure

(2016) Yongguang Wang et al.   TRIBOLOGY INTERNATIONAL

Microstructural characteristics and elastic modulus of porous solids

(2015) Zhangwei Chen et al.   ACTA MATERIALIA

Poly(N-isopropylacrylamide)-gated Fe3O4/SiO2 core shell nanoparticles with expanded mesoporous structures for the temperature triggered release of lysozyme

(2015) Erick Yu et al.   COLLOIDS AND SURFACES B-BIOINTERFACES

Core/shell composites with polystyrene cores and meso-silica shells as abrasives for improved chemical mechanical polishing behavior

(2015) Yang Chen et al.   JOURNAL OF NANOPARTICLE RESEARCH

An Interface Coassembly in Biliquid Phase: Toward Core–Shell Magnetic Mesoporous Silica Microspheres with Tunable Pore Size

(2015) Qin Yue et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Ultra-smooth BaTiO3 surface morphology using chemical mechanical polishing technique for high-k metal-insulator-metal capacitors

(2015) H.K. Sung et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Mesoporous silica core–shell composite functionalized with polyelectrolytes for drug delivery

(2015) N. Varga et al.   MICROPOROUS AND MESOPOROUS MATERIALS

Local densification of a single micron sized silica sphere by uniaxial compression

(2015) Stefan Romeis et al.   SCRIPTA MATERIALIA

Polymethylmethacrylate (PMMA)/CeO 2 hybrid particles for enhanced chemical mechanical polishing performance

(2015) Yang Chen et al.   TRIBOLOGY INTERNATIONAL

Armored MOFs: Enforcing Soft Microporous MOF Nanocrystals with Hard Mesoporous Silica

(2014) Zheng Li et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Ultrasmooth Gold Surfaces Prepared by Chemical Mechanical Polishing for Applications in Nanoscience

(2014) Michael S. Miller et al.   LANGMUIR

Advanced soap-free emulsion polymerization for highly pure, micron-sized, monodisperse polymer particles

(2014) Kazuhiro Shibuya et al.   POLYMER

Compressive elastic moduli and polishing performance of non-rigid core/shell structured PS/SiO2 composite abrasives evaluated by AFM

(2013) Ailian Chen et al.   APPLIED SURFACE SCIENCE

Compressive mechanical properties of porous alumina powder compacts

(2013) Yoshihiro Hirata et al.   CERAMICS INTERNATIONAL

Relationship between Porous and Mechanical Properties of Hydrothermally Synthesized Porous Materials from Diatomaceous Earth

(2013) Yani Jing et al.   INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH

Mechanical properties of nanoparticles: basics and applications

(2013) Dan Guo et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Modeling the effects of particle deformation in chemical mechanical polishing

(2012) Xiaochun Chen et al.   APPLIED SURFACE SCIENCE

Graphitic nanocrystals inside the pores of mesoporous silica: Synthesis, characterization and an adsorption study

(2011) F. de Clippel et al.   MICROPOROUS AND MESOPOROUS MATERIALS

Ordered hexagonal mesoporous silica materials (SBA-15) with additional disordered large-mesopore networks formed by gaseous expansion

(2010) Sen Liu et al.   MICROPOROUS AND MESOPOROUS MATERIALS

Mechanical properties of hierarchical porous silica thin films: Experimental characterization by nanoindentation and Finite Element modeling

(2010) David Jauffrès et al.   MICROPOROUS AND MESOPOROUS MATERIALS

Analyses and experimental confirmation of removal performance of silicon oxide film in the chemical–mechanical polishing (CMP) process with pattern geometry of concentric groove pads

(2010) Chin-Chung Wei et al.   WEAR

Preparation of polyelectrolyte-functionalized mesoporous silicas for the selective adsorption of anionic dye in an aqueous solution

(2009) Ji Bong Joo et al.   JOURNAL OF HAZARDOUS MATERIALS

Hollow Silica Spheres: Synthesis and Mechanical Properties

(2009) Lijuan Zhang et al.   LANGMUIR

Composite Polymer Core–Silica Shell Abrasives: The Effect of the Shape of the Silica Particles on Oxide CMP

(2008) S. Armini et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Copper CMP with Composite Polymer Core–Silica Shell Abrasives: A Defectivity Study

(2008) S. Armini et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY