Silica abrasives containing solid cores and mesoporous shells: Synthesis, characterization and polishing behavior for SiO 2 film

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Title
Silica abrasives containing solid cores and mesoporous shells: Synthesis, characterization and polishing behavior for SiO 2 film
Authors
Keywords
Silica, Mesoporous, Core–shell structure, Abrasive, Chemical mechanical polishing
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 663, Issue -, Pages 60-67
Publisher
Elsevier BV
Online
2015-12-18
DOI
10.1016/j.jallcom.2015.12.109

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