Analyses and experimental confirmation of removal performance of silicon oxide film in the chemical–mechanical polishing (CMP) process with pattern geometry of concentric groove pads

Title
Analyses and experimental confirmation of removal performance of silicon oxide film in the chemical–mechanical polishing (CMP) process with pattern geometry of concentric groove pads
Authors
Keywords
-
Journal
WEAR
Volume 270, Issue 3-4, Pages 172-180
Publisher
Elsevier BV
Online
2010-10-27
DOI
10.1016/j.wear.2010.10.057

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