Polishing mechanism and surface damage analysis of type IIa single crystal diamond processed by mechanical and chemical polishing methods

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Title
Polishing mechanism and surface damage analysis of type IIa single crystal diamond processed by mechanical and chemical polishing methods
Authors
Keywords
Diamond, Polishing, Mechanical, Chemical, Quartz, SiO, 2, SEM, Hydrogen termination
Journal
DIAMOND AND RELATED MATERIALS
Volume 63, Issue -, Pages 80-85
Publisher
Elsevier BV
Online
2015-12-02
DOI
10.1016/j.diamond.2015.11.021

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