Copper CMP with Composite Polymer Core–Silica Shell Abrasives: A Defectivity Study

Published 2008 View Full Article

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Title
Copper CMP with Composite Polymer Core–Silica Shell Abrasives: A Defectivity Study
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 156, Issue 1, Pages H18
Publisher
The Electrochemical Society
Online
2008-11-25
DOI
10.1149/1.2994631
References
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