Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics
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Title
Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics
Authors
Keywords
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Journal
SENSORS
Volume 17, Issue 5, Pages 1080
Publisher
MDPI AG
Online
2017-05-11
DOI
10.3390/s17051080
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