Enhancing the piezoelectric properties of flexible hybrid AlN materials using semi-crystalline parylene

Published 2017 View Full Article

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Title
Enhancing the piezoelectric properties of flexible hybrid AlN materials using semi-crystalline parylene
Authors
Keywords
-
Journal
Smart Materials and Structures
Volume 26, Issue 4, Pages 045005
Publisher
IOP Publishing
Online
2017-02-23
DOI
10.1088/1361-665x/aa5d99

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