Stress-driven AlN cantilever-based flow sensor for fish lateral line system

Title
Stress-driven AlN cantilever-based flow sensor for fish lateral line system
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2376-2378
Publisher
Elsevier BV
Online
2011-02-24
DOI
10.1016/j.mee.2011.02.091

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