AlN on polysilicon piezoelectric cantilevers for sensors/actuators

Published 2009 View Full Article

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Title
AlN on polysilicon piezoelectric cantilevers for sensors/actuators
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 4-6, Pages 1204-1207
Publisher
Elsevier BV
Online
2009-01-04
DOI
10.1016/j.mee.2008.12.075

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