Influence of silicon crystal orientation on piezoelectric textured aluminium nitride deposited on metal electrodes

Published 2016 View Full Article

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Title
Influence of silicon crystal orientation on piezoelectric textured aluminium nitride deposited on metal electrodes
Authors
Keywords
Crystal orientation, Aluminium nitride, Piezoelectrics, Sputtering
Journal
VACUUM
Volume 132, Issue -, Pages 47-52
Publisher
Elsevier BV
Online
2016-07-26
DOI
10.1016/j.vacuum.2016.07.019

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