Piezoelectric ultrasonic transducer based on flexible AlN

Title
Piezoelectric ultrasonic transducer based on flexible AlN
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 121, Issue -, Pages 59-63
Publisher
Elsevier BV
Online
2014-04-01
DOI
10.1016/j.mee.2014.03.034

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