Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers

Authors

Keywords

Journal

Volume 24, Issue 4, Pages 1142-1149

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2015-01-20

DOI

10.1109/jmems.2014.2387154

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