Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat
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Title
Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat
Authors
Keywords
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Journal
Nature Nanotechnology
Volume 12, Issue 6, Pages 575-581
Publisher
Springer Nature
Online
2017-03-24
DOI
10.1038/nnano.2017.34
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