Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat
出版年份 2017 全文链接
标题
Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat
作者
关键词
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出版物
Nature Nanotechnology
Volume 12, Issue 6, Pages 575-581
出版商
Springer Nature
发表日期
2017-03-24
DOI
10.1038/nnano.2017.34
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