Molecular Transfer Printing of Block Copolymer Patterns over Large Areas with Conformal Layers

Two-Dimensional Pattern Formation Using Graphoepitaxy of PS-b-PMMA Block Copolymers for Advanced FinFET Device and Circuit Fabrication

(2014) Hsinyu Tsai et al.   ACS Nano

Photochemical Reactions for Replicating and Aligning Block Copolymer Thin Film Patterns

(2014) Dustin W. Janes et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Response of Block Copolymer Thin-Film Morphology to Line-Width Roughness on a Chemoepitaxial Template

(2014) Paul N. Patrone et al.   MACROMOLECULES

Unidirectional Alignment of Block Copolymer Films Induced by Expansion of a Permeable Elastomer during Solvent Vapor Annealing

(2014) Zhe Qiang et al.   MACROMOLECULES

Evolutionary Optimization of Directed Self-Assembly of Triblock Copolymers on Chemically Patterned Substrates

(2014) Gurdaman S. Khaira et al.   ACS Macro Letters

Reactive fluorinated surfactant for step and flash imprint lithography

(2013) Tsuyoshi Ogawa et al.   Journal of Micro-Nanolithography MEMS and MOEMS

Light-Activated Replication of Block Copolymer Fingerprint Patterns

(2013) Dustin W. Janes et al.   MACROMOLECULES

Chemical Patterns for Directed Self-Assembly of Lamellae-Forming Block Copolymers with Density Multiplication of Features

(2013) Chi-Chun Liu et al.   MACROMOLECULES

Dynamic Thermal Field-Induced Gradient Soft-Shear for Highly Oriented Block Copolymer Thin Films

(2012) Gurpreet Singh et al.   ACS Nano

Nanotransfer Printing with sub-10 nm Resolution Realized using Directed Self-Assembly

(2012) Jae Won Jeong et al.   ADVANCED MATERIALS

Free Energy of Defects in Ordered Assemblies of Block Copolymer Domains

(2012) Umang Nagpal et al.   ACS Macro Letters

Sub-10 nm Nanofabrication via Nanoimprint Directed Self-Assembly of Block Copolymers

(2011) Sang-Min Park et al.   ACS Nano

Deposition and characterization of low temperature silicon nitride films deposited by inductively coupled plasma CVD

(2011) Abhijeet Kshirsagar et al.   APPLIED SURFACE SCIENCE

Domain Orientation and Grain Coarsening in Cylinder-Forming Poly(styrene-b-methyl methacrylate) Films

(2011) Shengxiang Ji et al.   MACROMOLECULES

Rectangular Patterns Using Block Copolymer Directed Assembly for High Bit Aspect Ratio Patterned Media

(2010) Ricardo Ruiz et al.   ACS Nano

Remediation of Line Edge Roughness in Chemical Nanopatterns by the Directed Assembly of Overlying Block Copolymer Films

(2010) Mark P. Stoykovich et al.   MACROMOLECULES

Molecular Transfer Printing Using Block Copolymers

(2009) Shengxiang Ji et al.   ACS Nano

Effect of Composition of Substrate-Modifying Random Copolymers on the Orientation of Symmetric and Asymmetric Diblock Copolymer Domains

(2008) Eungnak Han et al.   MACROMOLECULES

Rapid Directed Assembly of Block Copolymer Films at Elevated Temperatures

(2008) Adam M. Welander et al.   MACROMOLECULES

Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

(2008) I. Bita et al.   SCIENCE