Implementation of a chemo-epitaxy flow for directed self-assembly on 300-mm wafer processing equipment

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(2018)   ADVANCED MATERIALS

Fabrication of Lithographically Defined Chemically Patterned Polymer Brushes and Mats

(2011) Chi-Chun Liu et al.   MACROMOLECULES

Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

(2010) Joy Y. Cheng et al.   ACS Nano

Graphoepitaxial Assembly of Symmetric Block Copolymers on Weakly Preferential Substrates

(2010) Eungnak Han et al.   ADVANCED MATERIALS

Cross-sectional Imaging of Block Copolymer Thin Films on Chemically Patterned Surfaces

(2010) Guoliang Liu et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Integration of Directed Self-Assembly with 193 nm Lithography

(2010) Daniel P. Sanders et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Remediation of Line Edge Roughness in Chemical Nanopatterns by the Directed Assembly of Overlying Block Copolymer Films

(2010) Mark P. Stoykovich et al.   MACROMOLECULES

Interpolation in the Directed Assembly of Block Copolymers on Nanopatterned Substrates: Simulation and Experiments

(2010) François A. Detcheverry et al.   MACROMOLECULES

Rapid Directed Assembly of Block Copolymer Films at Elevated Temperatures

(2008) Adam M. Welander et al.   MACROMOLECULES

Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

(2008) R. Ruiz et al.   SCIENCE