Transition between kinetic and mass transfer regimes in the initiated chemical vapor deposition from ethylene glycol diacrylate

Published 2009 View Full Article

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Title
Transition between kinetic and mass transfer regimes in the initiated chemical vapor deposition from ethylene glycol diacrylate
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 27, Issue 5, Pages 1135-1143
Publisher
American Vacuum Society
Online
2009-08-01
DOI
10.1116/1.3168553

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