Three-Dimensional Integrated Circuit (3D IC) Key Technology: Through-Silicon Via (TSV)
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Title
Three-Dimensional Integrated Circuit (3D IC) Key Technology: Through-Silicon Via (TSV)
Authors
Keywords
Through-silicon via (TSV), Three-dimensional integrated circuit (3D IC)
Journal
Nanoscale Research Letters
Volume 12, Issue 1, Pages -
Publisher
Springer Nature
Online
2017-01-19
DOI
10.1186/s11671-017-1831-4
References
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Note: Only part of the references are listed.- Process Development and Optimization for 3 $\mu \text{m}$ High Aspect Ratio Via-Middle Through-Silicon Vias at Wafer Level
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