Fabrication of High Aspect Ratio TSV and Assembly With Fine-Pitch Low-Cost Solder Microbump for Si Interposer Technology With High-Density Interconnects

Title
Fabrication of High Aspect Ratio TSV and Assembly With Fine-Pitch Low-Cost Solder Microbump for Si Interposer Technology With High-Density Interconnects
Authors
Keywords
-
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-07-21
DOI
10.1109/tcpmt.2011.2155655

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