Accelerator Surface Phase Associated with Superconformal Cu Electrodeposition

Changing Superfilling Mode for Copper Electrodeposition in Blind Holes from Differential Inhibition to Differential Acceleration

(2009) O. Lühn et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Polyether Suppressors Enabling Copper Metallization of High Aspect Ratio Interconnects

(2009) Julie Mendez et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Inhibition of Copper Deposition by Polyethylene Glycol and Chloride

(2009) M. E. Huerta Garrido et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Acceleration Kinetics of PEG, PPG, and a Triblock Copolymer by SPS during Copper Electroplating

(2009) Joshua W. Gallaway et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Microvia Filling by Cu Electroplating Over a Au Seed Layer Modified by a Disulfide

(2009) Wei-Ping Dow et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Copper Fill of Microvia Using a Thiol-Modified Cu Seed Layer and Various Levelers

(2009) Wei-Ping Dow et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Surface relaxation phenomena at electrified interfaces: Revealing adsorbate, potential, and solvent effects by combined x-ray diffraction, STM and DFT studies

(2009) Martino Saracino et al.   PHYSICAL REVIEW B

Copper electrodeposition from an acidic plating bath containing accelerating and inhibiting organic additives

(2008) M.A. Pasquale et al.   ELECTROCHIMICA ACTA

A SERS study of the galvanostatic sequence used for the electrochemical deposition of copper from baths employed in the fabrication of interconnects

(2008) Lucia D’Urzo et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Interactions of Chloride and 3-Mercapto-1-Propanesulfonic Acid in Acidic Copper Sulfate Electrolyte

(2008) Hung-Ming Chen et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Interactions of Chloride and Polyethylene Glycol in Acidic Copper Sulfate Electrolyte

(2008) Hung-Ming Chen et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Inhibition of Copper Deposition by Polyethylene Glycol and Chloride

(2008) M. E. Huerta Garrido et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

3-Mercapto-1-propanesulfonic acid and Bis(3-sulfopropyl) Disulfide Adsorbed on Au(111): In Situ Scanning Tunneling Microscopy and Electrochemical Studies

(2008) Zheng-Yan Jian et al.   LANGMUIR

Selective Adsorption of Poly(ethylene oxide) onto a Charged Surface Mediated by Alkali Metal Ions†

(2007) Liraz Chai et al.   LANGMUIR