Investigation of plasma spokes in reactive high power impulse magnetron sputtering discharge

Revising secondary electron yields of ion-sputtered metal oxides

(2016) Carles Corbella et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Anomalous cross-Bfield transport and spokes in HiPIMS plasma

(2016) A Hecimovic   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Spoke rotation reversal in magnetron discharges of aluminium, chromium and titanium

(2016) A Hecimovic et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOxfilm growth

(2016) Robert Franz et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Ion energies in high power impulse magnetron sputtering with and without localized ionization zones

(2015) Yuchen Yang et al.   APPLIED PHYSICS LETTERS

On reactive high power impulse magnetron sputtering

(2015) J T Gudmundsson   PLASMA PHYSICS AND CONTROLLED FUSION

Spoke transitions in HiPIMS discharges

(2015) A Hecimovic et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Non-uniform plasma distribution in dc magnetron sputtering: origin, shape and structuring of spokes

(2015) Matjaž Panjan et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Note: Ion-induced secondary electron emission from oxidized metal surfaces measured in a particle beam reactor

(2015) Adrian Marcak et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering

(2014) André Anders   APPLIED PHYSICS LETTERS

The characteristic shape of emission profiles of plasma spokes in HiPIMS: the role of secondary electrons

(2014) A Hecimovic et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons

(2014) Matjaž Panjan et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides

(2013) Montri Aiempanakit et al.   JOURNAL OF APPLIED PHYSICS

Current–voltage characteristics and fast imaging of HPPMS plasmas: transition from self-organized to homogeneous plasma regimes

(2013) T de los Arcos et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

On sheath energization and Ohmic heating in sputtering magnetrons

(2013) Chunqing Huo et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces

(2013) Carles Corbella et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Comparison of Al–Si–N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering

(2013) Erik Lewin et al.   SURFACE & COATINGS TECHNOLOGY

Current–voltage–time characteristics of the reactive Ar/O2 high power impulse magnetron sputtering discharge

(2012) Fridrik Magnus et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Role of Tin+ and Aln+ ion irradiation (n=1, 2) during Ti1-xAlxN alloy film growth in a hybrid HIPIMS/magnetron mode

(2012) G. Greczynski et al.   SURFACE & COATINGS TECHNOLOGY

$\hbox{CrN}_{\rm x}$ Films Prepared by DC Magnetron Sputtering and High-Power Pulsed Magnetron Sputtering: A Comparative Study

(2010) Grzegorz Greczynski et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Origin of the Delayed Current Onset in High-Power Impulse Magnetron Sputtering

(2010) Georgy Yu. Yushkov et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Vibrational level population of nitrogen impurities in low-pressure argon glow discharges

(2010) Péter Simon et al.   JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY

SRIM – The stopping and range of ions in matter (2010)

(2010) James F. Ziegler et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Faster-than-Bohm Cross-BElectron Transport in Strongly Pulsed Plasmas

(2009) N. Brenning et al.   PHYSICAL REVIEW LETTERS

Study of a HPPMS discharge in Ar/O2mixture: I. Discharge characteristics with Ru cathode

(2009) D Benzeggouta et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Determination of the effective electron emission yields of compound materials

(2008) D Depla et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Cross-field ion transport during high power impulse magnetron sputtering

(2008) Daniel Lundin et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY