Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces
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Title
Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces
Authors
Keywords
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Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 84, Issue 10, Pages 103303
Publisher
AIP Publishing
Online
2013-10-25
DOI
10.1063/1.4826066
References
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