Role of Tin+ and Aln+ ion irradiation (n=1, 2) during Ti1-xAlxN alloy film growth in a hybrid HIPIMS/magnetron mode

Title
Role of Tin+ and Aln+ ion irradiation (n=1, 2) during Ti1-xAlxN alloy film growth in a hybrid HIPIMS/magnetron mode
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 206, Issue 19-20, Pages 4202-4211
Publisher
Elsevier BV
Online
2012-04-19
DOI
10.1016/j.surfcoat.2012.04.024

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