Cross-field ion transport during high power impulse magnetron sputtering

Published 2008 View Full Article

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Title
Cross-field ion transport during high power impulse magnetron sputtering
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 17, Issue 3, Pages 035021
Publisher
IOP Publishing
Online
2008-07-08
DOI
10.1088/0963-0252/17/3/035021

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