On sheath energization and Ohmic heating in sputtering magnetrons

Published 2013 View Full Article

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Title
On sheath energization and Ohmic heating in sputtering magnetrons
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 22, Issue 4, Pages 045005
Publisher
IOP Publishing
Online
2013-06-17
DOI
10.1088/0963-0252/22/4/045005

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